高温射频同轴与电子信号复合电缆AC320101AT

2026-07-09
供应商
部品 Maker
ModelSEMPRO-SMART
Guaranteed Contact Accuracy
                   (Pin to Pad)
X/Y (μm)±1.5 μm

Z (μm)±2.0 μm
Stage XX axisProbing Area±184 mm (Card 중심 기준)Motor : SAMIK
                   Driver : PANASONIC
                   LM : ONE-EST (Korean) or THK
Max. Speed (mm/s)450 mm/s
Drive MethodLinear Motor
Control Resolution0.4 μm
Accuracy±1.5 μm
Stage YY axisProbing Area-360 mm ~ +150 mm (Card 중심 기준)Motor : SAMIK
                   Driver : PANASONIC
                   LM : ONE-EST (Korean) or THK
Max. Speed (mm/s)450 mm/s
Drive MethodLinear Motor
Control Resolution0.4 μm
Accuracy±1.5 μm
Stage ZZ axisFull Stroke80 mmMotor : SAMIK
                   Driver : PANASONIC
                   LM : ONE-EST (Korean) or THK
Standard Stroke at Probing80 mm
Max. Speed (mm/s)70 mm/s
Contact Setting Range Max. ~ Min. (mm)70 mm
Drive MethodServo Motor
Control Resolution0.8 μm
Accuracy (μm)±2.0 μm
Over-shoot Max. (μm)Max. 4 μm
Stage θθ axisAdjustable Range-2° ~ +2°Motor : SAMIK
                   Driver : PANASONIC
                   LM : ONE-EST (Korean) or THK
Drive MethodStep Motor
θ BearingCross Roller Bearing
Resolution (μm)0.04 μm
Chuck
Dimension (mm)308 mm

Z Motor Force500 kgf

Material of SurfaceAluminium

Chuck Top Planarity (μm)                    ** Actual data is better than spec15 μm

Auto Leveling Option AvailabilityO